SiC/Al-Carbon/Al composite
'High modulus' SiC/Al composite core and 'machinable'
carbon /Al composite surface for stepper base plate application
Expected for the semiconductor industry with limited thermal expansion |
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WS2/resin molding
Tungsten disulfide with the solid lubricity was molded with
the resin. The usage as parts with the self-lubrication is
examined.
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